The influence of thickness and ammonia flow rate on the properties of AlN layers
Authors:
- S. ÇörekçiSÇS. Çörekçi
- M.K. ÖztürkMÖM.K. Öztürk
- M. ÇakmakMÇM. Çakmak
- S. ÖzçelikSÖS. Özçelik
- E. ÖzbayEÖE. Özbay
- 1 February 2012
- journal article
- research article
- Published by Elsevier in Materials Science in Semiconductor Processing
- Vol. 15 (1) , 32-36
Abstract
No abstract availableKeywords
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