Effect of O2/Ar flow ratio and post-deposition annealing on the structural, optical and electrical characteristics of SrTiO3 thin films deposited by RF sputtering at room temperature
Authors:
- E. GoldenbergEGE. Goldenberg
- T. BayrakTBT. Bayrak
- C. Ozgit-AkgunCOC. Ozgit-Akgun
- A. HaiderAHA. Haider
- S.A. LeghariSLS.A. Leghari
- M. KumarMKM. Kumar
- N. BiyikliNBN. Biyikli
- 1 September 2015
- journal article
- research article
- Published by Elsevier in Thin Solid Films
- Vol. 590, 193-199
Abstract
No abstract availableKeywords
Funding Information
- TÜBİTAK (113C020)
- TÜBİTAK (111A015)
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