On the microstructural, optical and mechanical properties of hydrogenated amorphous carbon films deposited in electron cyclotron resonance plasma
Authors:
- O. Durand-DrouhinODO. Durand-Drouhin
- A. ZeinertAZA. Zeinert
- M. BenlahsenMBM. Benlahsen
- K. ZellamaKZK. Zellama
- R. KréRKR. Kré
- G. TurbanGTG. Turban
- A. GrosmanAGA. Grosman
- 1 April 2000
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 9 (3-6) , 752-755
Abstract
No abstract availableThis publication has 20 references indexed in Scilit:
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