Thermal optimization of CZ bulk growth and wafer annealing for crystalline dislocation-free silicon
Authors:
- A.I. ProstomolotovAPA.I. Prostomolotov
- N.A. VerezubNVN.A. Verezub
- M.V. MezhenniiMMM.V. Mezhennii
- V.YA. ReznikVRV.YA. Reznik
- 1 March 2011
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 318 (1) , 187-192
Abstract
No abstract availableFunding Information
- Russian–Belarusian (10-02-90004)
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