Effects of component imperfections on ellipsometer calibration
Author:
- William Ralph HunterWHWilliam Ralph Hunter
- 1 August 1973
- journal article
- Published by Optica Publishing Group in Journal of the Optical Society of America
- Vol. 63 (8) , 951-957
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
This publication has 8 references indexed in Scilit:
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- The effects of polarizer ellipticity on ellipsometry measurementsSurface Science, 1970
- Analyses and Corrections of Instrumental Errors in EllipsometryJournal of the Optical Society of America, 1970
- Definitions and conventions in ellipsometrySurface Science, 1969
- Ellipsometry Using a Retardation Plate as Compensator*Journal of the Optical Society of America, 1967
- Measurement of the thickness and refractive index of very thin films and the optical properties of surfaces by ellipsometryJournal of Research of the National Bureau of Standards Section A: Physics and Chemistry, 1963