Analytical static modelling and optimization of electrostatic micropumps

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1 September 1997

journal article
Published by IOP Publishing in Journal of Micromechanics and Microengineering

Vol. 7 (3) , 183-185
DOI:10.1088/0960-1317/7/3/027

Abstract

No abstract available

Keywords

ANALYTIC SOLUTION

This publication has 1 reference indexed in Scilit:

Static response of miniature capacitive pressure sensors with square or rectangular silicon diaphragm
Revue de Physique Appliquée, 1987