Polysilicon Thin Film Developed on Flexible Polyimide for Biomedical Applications
Authors:
Open Access
- 7 June 2016
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 25 (4) , 585-592
Abstract
Flexible pressure and thermal sensors are the critical parts of the functional electronic skin of prostheses and robots, as well as flexible catheter/devices for multimodal biomedical monitoring. In this paper, a polysilicon thin film was developed on a flexible polyimide substrate using aluminum induced crystallization process for biomedical pressure and temperature sensing applications. The formation of polycrystalline structure was verified from the developed polysilicon film. Long term stability and real-time temperature tests were performed to evaluate potential application to the in vivo monitoring of brain or body temperature. The linear real-time change of polysilicon resistance with temperature was attained with the temperature coefficient of the resistance of −0.0027/°C and the resolution of 0.05 °C. With a gauge factor of 10.3, the polysilicon film developed in this paper represents a promising material for the development of high-sensitivity pressure sensors on flexible polyimide substrates. [2015-0106]Keywords
Funding Information
- U.S. Department of War (PT090526P4, W81XWH-10-1-0978)
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