Micro/nanotribological studies of polysilicon and SiC films for MEMS applications

This publication has 32 references indexed in Scilit:

• Lubrication of digital micromirrordevicesTM
  Tribology Letters, 1997
• Microtribological Characterization of Self-Assembled and Langmuir-Blodgett Monolayers by Atomic and Friction Force Microscopy
  Langmuir, 1995
• Silicon micromachined SCALED technology
  IEEE Transactions on Industrial Electronics, 1995
• Magnetic recording-head positioning at very high track densities using a microactuator-based, two-stage servo system
  IEEE Transactions on Industrial Electronics, 1995
• Wear at microscopic scales and light loads for MEMS applications
  Wear, 1995
• Micromachines on the march
  IEEE Spectrum, 1994
• Development of integrated suspension system for a nanoslider with an MR head transducer
  IEEE Transactions on Magnetics, 1993
• Contact-start-stop studies with silicon planar head sliders against thin-film disks
  IEEE Transactions on Magnetics, 1992
• In situ friction and wear measurements in integrated polysilicon mechanisms
  Sensors and Actuators A: Physical, 1990
• A new thin film head generation IC head
  IEEE Transactions on Magnetics, 1989