Ion energy distributions at a capacitively and directly coupled electrode immersed in a plasma generated by a remote source
Authors:
- C HaydenCHC Hayden
- D GahanDGD Gahan
- M B HopkinsMHM B Hopkins
- 4 March 2009
- journal article
- research article
- Published by IOP Publishing in Plasma Sources Science and Technology
- Vol. 18 (2)
Abstract
No abstract availableThis publication has 36 references indexed in Scilit:
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