Gas-phase selective etching of native oxide
Authors:
- N. MikiNMN. Miki
- H. KikuyamaHKH. Kikuyama
- I. KawanabeIKI. Kawanabe
- M. MiyashitaMMM. Miyashita
- T. OhmiTOT. Ohmi
- 1 January 1990
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 37 (1) , 107-115
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
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