Dual rotating compensator ellipsometry: Theory and simulations
Authors:
- Jian LiJLJian Li
- Balaji RamanujamBRBalaji Ramanujam
- R.W. CollinsRCR.W. Collins
- 1 February 2011
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 519 (9) , 2725-2729
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Second-order systematic errors in Mueller matrix dual rotating compensator ellipsometryApplied Optics, 2010
- Systematic errors for a Mueller matrix dual rotating compensator ellipsometerOptics Express, 2008
- Multichannel Mueller Matrix Ellipsometry for Simultaneous Real-Time Measurement of Bulk Isotropic and Surface Anisotropic Complex Dielectric Functions of SemiconductorsPhysical Review Letters, 2003
- Optimization of a dual-rotating-retarder Mueller matrix polarimeterApplied Optics, 2002
- Dual rotating-compensator multichannel ellipsometer: Instrument development for high-speed Mueller matrix spectroscopy of surfaces and thin filmsReview of Scientific Instruments, 2001
- Optimization of retardance for a complete Stokes polarimeterOptics Letters, 2000