AlGaAs superlattice microcoolers

AlGaAs-based superlattice microcoolers are demonstrated. Maximum cooling temperatures of 0.8 °C and 2 °C were obtained at 25 °C and 100 °C, respectively, from 60 μm×60 μm devices with 100 period ${\mathrm{Al}}_{\text{0.10}}{\mathrm{Ga}}_{\text{0.90}}{\mathrm{As/Al}}_{\text{0.20}}{\mathrm{Ga}}_{\text{0.80}}\mathrm{As}$ $n$ -type superlattice thermal barriers. These devices may be useful for in situ cooling of GaAs-based microelectronic and optoelectronic devices.