Field distortion correction in galvanometric scanning system by interpolation with symmetric polynomials

This publication has 23 references indexed in Scilit:

• Generic distortion model for metrology under optical microscopes
  Optics and Lasers in Engineering, 2018
• Large scale layering laser surface texturing system based on high speed optical scanners and gantry machine tool
  Robotics and Computer-Integrated Manufacturing, 2017
• Reducing field distortion for galvanometer scanning system using a vision system
  Optics and Lasers in Engineering, 2016
• Influence of beam radii on a common-path compensation method for laser beam drifts in laser collimation systems
  Measurement Science and Technology, 2016
• Optical design and performance of F-Theta lenses for high-power and high-precision applications
  2015
• Correction of the field distortion in embedded laser marking system
  Optics & Laser Technology, 2014
• Correction of field distortion of laser marking systems using surface compensation function
  Optics and Lasers in Engineering, 2009
• Compensating technique of field-distorting error for the CO2 laser galvanometric scanning drilling machines
  International Journal of Machine Tools and Manufacture, 2007
• Correction of the image distortion for laser galvanometric scanning system
  Optics & Laser Technology, 2005
• CAE-based compensation methods of non-uniform pulse laser beam profiles
  Optics and Lasers in Engineering, 1999