Precipitation of oxygen in single-crystal silicon implanted with high doses of oxygen
Authors:
- P.L.F. HemmentPHP.L.F. Hemment
- E.A. Maydell-OndruszEME.A. Maydell-Ondrusz
- J.E. CastleJCJ.E. Castle
- R. PaynterRPR. Paynter
- M.C. WilsonMWM.C. Wilson
- R.G. BookerRBR.G. Booker
- J.A. KilnerJKJ.A. Kilner
- R.P. ArrowsmithRAR.P. Arrowsmith
- 1 June 1985
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 128 (1-2) , 125-131
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
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