Volatile and thermally stable tungsten organometallic complexes (RCp)W(CO)2(η3-2-tert-butylallyl) as potential thin film deposition precursor
- 15 April 2024
- journal article
- research article
- Published by Elsevier in Inorganica Chimica Acta
- Vol. 567
Abstract
No abstract availableKeywords
Funding Information
- Sun Yat-sen University
This publication has 48 references indexed in Scilit:
- Atomic layer deposition of tungsten and tungsten-based compounds using WCl5 and various reactants selected by density functional theoryApplied Surface Science, 2021
- Nickel‐Catalyzed Asymmetric Reductive 1,2‐Carboamination of Unactivated AlkenesAngewandte Chemie International Edition, 2019
- Improved durability and activity of Pt/C catalysts through atomic layer deposition of tungsten nitride and subsequent thermal treatmentApplied Catalysis B: Environment and Energy, 2019
- Precursors as enablers of ALD technology: Contributions from University of HelsinkiCoordination Chemistry Reviews, 2013
- ALD Precursors and Reaction Mechanisms2013
- Atomic Layer Deposition of WO3 Thin Films using W(CO)6 and O3 PrecursorsChemical Vapor Deposition, 2012
- Growth, structure, and tribological behavior of atomic layer-deposited tungsten disulphide solid lubricant coatings with applications to MEMSActa Materialia, 2006
- Organometallic Precursors for Atomic Layer Deposition2005
- Diffusion Barrier Deposition on a Copper Surface by Atomic Layer DepositionChemical Vapor Deposition, 2002
- The vapour pressure of benzoic acidThe Journal of Chemical Thermodynamics, 1982