Abstract
The structure, mechanical properties, and friction properties of hydrogenated graphitelike carbon film and typical hydrogenated diamondlike carbon film were investigated comparatively that the hydrogenated graphitelike carbon film has relatively high sp2 content and low bonded hydrogen content and possessed high hardness and elasticity. It was attributed to the curved graphene microstructure, which is able to form three-dimensional covalently bonded network. Furthermore, in comparison with the hydrogenated diamondlike carbon film, the hydrogenated graphitelike carbon film demonstrated excellent friction behavior probably due to the extraordinary structure of hydrogenated graphitelike carbon film.

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