Silicon nitride as a mask in phosphorus diffusion
Authors:
- 31 December 1969
- journal article
- Published by Elsevier in Solid-State Electronics
- Vol. 12 (12) , 955-962
Abstract
No abstract availableKeywords
This publication has 12 references indexed in Scilit:
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- Diffusion and oxide masking in silicon by the box methodSolid-State Electronics, 1960
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