Correction of misalignment introduced aberration in non-null test measurements of free-form surfaces

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Abstract
In interferometric testing of surfaces a major task is to avoid the introduction of aberrations due to misalignment of the surface under test. An automated method for the positioning of aspheric and free-form surfaces in a non-null test interferometer, as well as a method for the distinction between alignment introduced aberrations and surface errors is presented. A combination of both methods allows for a fully automated alignment with low requirements to the accuracy of the positioning stage. Further, the misalignment introduced uncertainties to the measurement are estimated. Simulation results as well as experimental results showing the feasibility of the method are presented.

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