Oxygen active species in an Ar–O2 magnetron discharge for titanium oxide deposition
Authors:
- P.-Y JouanPJP.-Y Jouan
- A RicardARA Ricard
- 1 January 2003
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 205 (1-4) , 249-255
Abstract
No abstract availableKeywords
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