Demonstration of three-dimensional microstructure self-assembly
Authors:
- P.W. GreenPGP.W. Green
- R.R.A. SymsRSR.R.A. Syms
- E.M. YeatmanEYE.M. Yeatman
- 1 January 1995
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 4 (4) , 170-176