On structure and properties of sputtered Ti and Al based hard compound films
Authors:
- O. KnotekOKO. Knotek
- M. BöhmerMBM. Böhmer
- T. LeyendeckerTLT. Leyendecker
- 1 November 1986
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 4 (6) , 2695-2700