Effect of different etching processes on edge breakdown suppression for planar InP/InGaAs avalanche photodiodes
Authors:
- Bongyong LeeBLBongyong Lee
- Ilgu YunIYIlgu Yun
- 1 August 2002
- journal article
- Published by Elsevier in Microelectronics Journal
- Vol. 33 (8) , 645-649
Abstract
No abstract availableKeywords
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