Refractive micro lens array made of dichromate gelatin with gray-tone photolithography
Authors:
- Jun YaoJYJun Yao
- Zheng CuiZCZheng Cui
- Fuhua GaoFGFuhua Gao
- Yixiao ZhangYZYixiao Zhang
- Yongkang GuoYGYongkang Guo
- Chunlei DuCDChunlei Du
- Hongjun ZengHZHongjun Zeng
- Chuankai QiuCQChuankai Qiu
- 1 September 2001
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 57-58, 729-735
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Coding gray-tone mask for refractive microlens fabricationMicroelectronic Engineering, 2000
- Simulation and Process Design of Gray-Tone Lithography for the Fabrication of Arbitrarily Shaped SurfacesJapanese Journal of Applied Physics, 1994
- Spatial Resolution of Relief Holograms in Dichromated GelatinApplied Optics, 1971
- Phase Holograms in Dichromated GelatinApplied Optics, 1968