Atomic Layer Deposition of Indium‐Tin‐Oxide as Multifunctional Coatings on V2O5 Thin‐Film Model Electrode for Lithium‐Ion Batteries

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Abstract
This work demonstrates the possible usages of indium tin oxide (ITO) thin‐films as multifunctional coatings on V2O5 model electrodes for lithium‐ion batteries (LIBs). The thin films are produced with the atomic layer deposition (ALD) method via adjusting the ratio of In2O3 and SnO2 sub‐layers to a well‐controlled In: Sn contents. The highest conductivity value (7.37 × 10−4 Ω cm) of as‐grown ITO film is obtained from the sample containing 5% SnO2 of overall ALD cycles. The ITO thin‐films are further investigated as multifunctional coatings on ALD V2O5 electrodes for LIBs: At first, dual electronic and ionic conductive protecting properties of ITO layer are explored to attenuate the fading of the battery capacity by improving the cycling stability. Second, the feasibility of ITO layer as a dual functioning current collector‐cum‐protective coating layer is demonstrated. Third, ITO layer is investigated as a current collector and display performance comparable to that of Pt as current collector of traditional thin‐film LIBs. The electronic and electrochemical properties of ITO provide the opportunity to use ITO as a multifunctional coating for (3D) thin‐film LIBs and can find potential usages in miniaturized electronic devices.
Funding Information
  • Fonds Wetenschappelijk Onderzoek
  • Vlaamse regering (1S68518N, GO87418N)
  • Bijzonder Onderzoeksfonds UGent
  • Universiteit Gent (01G01513, 01G01019)

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