Abstract
The properties of a microwave‐induced argon plasma produced by traveling surface wave at atmospheric pressure are investigated theoretically. A hydrokinetic model is elaborated to obtain the nonequilibrium one‐dimensional profiles of electron temperature T e (average electron energy), electron density n e , and the first excited state population density n 4s , along the axis of a steady‐state discharge. A three‐level atomic structure is assumed for the argon atom. A particle balance is included through the continuity equations for n e and n 4s . These equations are coupled with an energy balance equation for the electrons. The effects of different parameters on the properties of the argon discharge are investigated: discharge tube radius, gas flow rate, resonant radiation‐escape factor, and neutral gas temperature.

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