Improved performance of large stroke comb-drive actuators by using a stepped finger shape
Authors:
- 1 June 2009
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 34 (2159547X) , 1762-1765
Abstract
In this work we describe an electrostatic mass-balanced planar x/y-scanner, using an optimized comb finger shape, designed for parallel-probe storage applications. We show a new stepped comb finger shape design, that has superior force/displacement characteristics leading to a larger stroke at the same voltage and a larger available force compared to straight or tapered shapes.Keywords
This publication has 7 references indexed in Scilit:
- Thermo-mechanical probe storage at Mbps single-probe data rates and Tbit in−2densitiesNanotechnology, 2008
- Probe-based ultrahigh-density storage technologyIBM Journal of Research and Development, 2008
- A Vibration Resistant Nanopositioner for Mobile Parallel-Probe Storage ApplicationsJournal of Microelectromechanical Systems, 2007
- Wafer-Scale Microdevice Transfer/Interconnect: Its Application in an AFM-Based Data-Storage SystemJournal of Microelectromechanical Systems, 2004
- Design of large deflection electrostatic actuatorsJournal of Microelectromechanical Systems, 2003
- Shaped comb fingers for tailored electromechanical restoring forceJournal of Microelectromechanical Systems, 2003
- Enhanced electrostatic force generation capabilityof angled comb finger design used in electrostatic comb-drive actuatorsElectronics Letters, 1998