Substrate hardness dependency on properties of Al2O3 thick films grown by aerosol deposition

Authors:
  • DLDong-Won Lee
    Dong-Won Lee
  • HKHyung-Jun Kim
    Hyung-Jun Kim
  • YKYong-Nam Kim
    Yong-Nam Kim
  • MJMin-Seok Jeon
    Min-Seok Jeon
  • SNSong-Min Nam
    Song-Min Nam

Abstract
No abstract available
Keywords

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