Ion-sensing devices with silicon nitride and borosilicate glass insulators
Authors:
- L.J. BousseLBL.J. Bousse
- J.D. ShottJSJ.D. Shott
- J.D. MeindlJMJ.D. Meindl
- 1 August 1987
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 34 (8) , 1700-1707
Abstract
Ion-sensitive field-effect transistors (ISFET's) with silicon dioxide, silicon nitride, and borosilicate glass as the active gate material were fabricated and tested for pH-sensing applications. The borosilicate glass and silicon nitride devices were found to have a linear potential/pH response and previous theories of ISFET function were inadequate to explain this. A two-site theory is presented that can explain the features of the potential/pH response of both silicon nitride and borosilicate glass ISFETs. The model is easily extended to any two-site system.Keywords
This publication has 27 references indexed in Scilit:
- A generalized theory of an electrolyte-insulator-semiconductor field-effect transistorIEEE Transactions on Electron Devices, 1986
- Characterization of Aqueous Colloids by Their Electrical Double-Layer and Intrinsic Surface Chemical Properties1982
- Ion-selective field effect transistors with polymeric membranesAnalytica Chimica Acta, 1978
- Ionizable surface group models of aqueous interfacesAdvances in Colloid and Interface Science, 1978
- A radiotracer determination of the adsorption of sodium ion in the compact part of the double layer of vitreous silicaJournal of Colloid and Interface Science, 1978
- The structure of the silica/electrolyte interfaceJournal of Colloid and Interface Science, 1976
- Site-binding model of the electrical double layer at the oxide/water interfaceJournal of the Chemical Society, Faraday Transactions 1: Physical Chemistry in Condensed Phases, 1974
- Theory of the differential capacity of the oxide/aqueous electrolyte interfaceDiscussions of the Faraday Society, 1971
- The structure of the electrical double layer on porous surfacesJournal of Electroanalytical Chemistry and Interfacial Electrochemistry, 1968
- Infrared Study of the Nature of the Hydroxyl Groups on the Surface of Porous GlassThe Journal of Physical Chemistry, 1966