Kinetic Spectra of Polyatomic Clusters Formed via the Ion Sputtering of Metals
Authors:
- 1 February 2018
- journal article
- Published by Allerton Press in Bulletin of the Russian Academy of Sciences: Physics
- Vol. 82 (2) , 142-144
Abstract
A theory is developed for the ion sputtering of metals resulting in the formation of excited neutral and charged clusters with their subsequent fragmentation to a stable state. The effect...Keywords
This publication has 4 references indexed in Scilit:
- Neutral cluster size and fragmentation during ion sputtering of solidsTechnical Physics Letters, 2015
- Energies, charges, and sizes of clusters under ion sputtering of a metalJournal of Experimental and Theoretical Physics, 2010
- Relative yields, mass distributions and energy spectra of cluster ions sputtered from niobium under keV atomic and polyatomic gold ion bombardmentNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2000
- VUV photoionization of sputtered neutral silver clustersNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1994