Investigation of Electromechanical Coupling and Quality Factor of X-Cut Lithium Niobate Laterally Vibrating Resonators Operating Around 400 MHz

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Abstract
In this paper we present laterally vibrating resonators (LVRs) based on X-cut lithium niobate (LN) exhibiting a maximum quality factor (Q) around 1200 and an electromechanical coupling (k t 2 ) of 30%. This paper shows how the highest k t 2 ever attained in X-cut LN resonators can be combined with very high Q to achieve a resonator figure of merit (FoM = k t 2 · Q) of 360. In this paper, we validate the theoretical prediction of k t 2 versus the resonator orientation in the YZ plane and investigate what geometrical parameters mostly impact the Q of these devices.
Funding Information
  • Defense Advanced Research Projects Agency (HR0011-15-C-0137)

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