Contamination control in gas delivery systems for MOCVD
Authors:
- Tadaharu WatanabeTWTadaharu Watanabe
- Hans H. FunkeHFHans H. Funke
- Robert TorresRTRobert Torres
- Mark W. RaynorMRMark W. Raynor
- Joseph VininskiJVJoseph Vininski
- Virginia H. HouldingVHVirginia H. Houlding
- 1 February 2003
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 248, 67-71
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Impurities in hydride gases part 1: Investigation of trace moisture in the liquid and vapor phase of ultra-pure ammonia by FTIR spectroscopyJournal of Electronic Materials, 2001
- The system ammonia + carbon dioxide + ammonium carbamate. Part I.—The equilibrium of thermal dissociation of ammonium carbamateTransactions of the Faraday Society, 1953