Investigation of substoichiometric titanium nitride grown by unbalanced magnetron sputtering

Authors:
  • SYS Yang
    S Yang
  • DLD.B Lewis
    D.B Lewis
  • IWI Wadsworth
    I Wadsworth
  • JCJ Cawley
    J Cawley
  • JBJ.S Brooks
    J.S Brooks
  • WMW.D Münz
    W.D Münz

Abstract
No abstract available

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