Defective wafer detection using a denoising autoencoder for semiconductor manufacturing processes
Authors:
- Shu-Kai S. FanSFShu-Kai S. Fan
- Chia-Yu HsuCHChia-Yu Hsu
- Chih-Hung JenCJChih-Hung Jen
- Kuan-Lung ChenKCKuan-Lung Chen
- Li-Ting JuanLJLi-Ting Juan
- 1 October 2020
- journal article
- research article
- Published by Elsevier in Advanced Engineering Informatics
- Vol. 46
Abstract
No abstract availableKeywords
Funding Information
- Ministry of Science and Technology, Taiwan
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