Surface processes in MEMS technology

Author:

RMR Maboudian
R Maboudian

Publisher website

1 January 1998

journal article
Published by Elsevier in Surface Science Reports

Vol. 30 (6-8) , 207-269
DOI:10.1016/s0167-5729(97)00014-9

Abstract

No abstract available

Keywords

Cited by 249 articles