A Novel Approach of −80 °C Cascade Refrigeration System Using Non-Flammable Quaternary Refrigerants for Semiconductor Process Applications

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Abstract
Ultra-low temperature chillers have seen increasing demand with the advancement of semiconductor technology. Mixed refrigerant (MR) cascade refrigeration systems (CRSs) are widely utilized for their stability and high cooling performance at low temperatures. Extensive research has been conducted on optimizing MR, which has a significant impact on CRS performance. However, most previous studies have either fixed the system pressure or used the refrigeration effect as the sole performance indicator. This did not account for the potential of achieving higher performance with an optimal MR composition at the same target temperature. In this study, a detailed parametric analysis was performed to investigate how the mass fractions of high-, mid-, and low boiling point refrigerants affect the coefficient of performance (COP) and exergy in ultra-low temperature CRSs without fixing the suction pressure. The analysis revealed that at the point of maximum COP, the refrigeration effect was relatively low, highlighting the limitations of using the refrigeration effect alone as a performance indicator. Additionally, COP was found to inversely correlate with total exergy destruction. As cascade temperature increases, COP tends to decrease, emphasizing the need for appropriate cascade temperature selection for MR CRS performance. This study introduces a novel approach to optimizing MR composition under various operating conditions, contributing to the advancement of ultra-low temperature CRSs.
Funding Information
  • Korea Institute of Energy Technology Evaluation and Planning (KETEP) grant funded by the Korean government (MOTIE) (RS-2024-00418835)

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