Formation of porous silicon on patterned substrates
Authors:
- M KrügerMKM Krüger
- R Arens-FischerRAR Arens-Fischer
- M ThönissenMTM Thönissen
- H MünderHMH Münder
- M.G BergerMBM.G Berger
- H LüthHLH Lüth
- S HilbrichSHS Hilbrich
- W TheissWTW Theiss
- 1 April 1996
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 276 (1-2) , 257-260
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Micromachining applications of porous siliconThin Solid Films, 1995
- Sub-micrometre luminescent porous silicon structures using lithographically patterned substratesThin Solid Films, 1995
- Process-induced mechanical stress in isolation structures studied by micro-Raman spectroscopyJournal of Applied Physics, 1993