Abstract
A planar mixed-potential-type sensor using a yttria-stabilized zirconia and oxide-based sensing electrode (SE) was fabricated and the preliminary results on sensing characteristics were reported here. It was found that the sensor attached with exhibited good sensitivity and excellent selectivity to at under the wet condition ( ). While the cross sensitivities to the other examined gases were about or negligible, the sensitivity to was about . The of the sensor varied almost linearly with the concentration in the examined range of .

This publication has 17 references indexed in Scilit: