Self-heated hollow cathode discharge system for charged particle sources and plasma generators
- 1 February 2010
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 81 (2) , 02B305
Abstract
This paper presents the results of experimental studies of a new design of discharge system using a self-heated hollow cathode. The discharge system offers certain advantages that are attractive for use in high-dose ion implantation, plasma generators, and plasma electron sources.Keywords
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