Comparison of plasma generation behaviors between a single crystal semiconductor bridge (single-SCB) and a polysilicon semiconductor bridge (poly-SCB)

Authors:
  • MPMyung-Il Park
    Myung-Il Park
  • HCHyo-Tae Choo
    Hyo-Tae Choo
  • SYSuk-Hwan Yoon
    Suk-Hwan Yoon
  • CPChong-Ook Park
    Chong-Ook Park

Abstract
No abstract available

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