Surface studies of carbon films from pyrolyzed photoresist
Authors:
- R KosteckiRKR Kostecki
- B SchnyderBSB Schnyder
- D AlliataDAD Alliata
- X SongXSX Song
- K KinoshitaKKK Kinoshita
- R KötzRKR Kötz
- 1 September 2001
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 396 (1-2) , 36-43
Abstract
No abstract availableThis publication has 39 references indexed in Scilit:
- Development of a carbon-based lithium microbatteryJournal of Power Sources, 1999
- In Situ Iron K-Edge XANES Study of Iron Phthalocyanine Irreversibly Adsorbed on an Electrode SurfaceElectrochemical and Solid-State Letters, 1999
- Electrochemical Studies of Carbon Films from Pyrolyzed PhotoresistJournal of the Electrochemical Society, 1998
- Vapor deposition processes for amorphous carbon films with sp3 fractions approaching diamondJournal of Applied Physics, 1991
- Intrinsic stress in diamond films prepared by microwave plasma CVDJournal of Applied Physics, 1991
- Atomic constraint in hydrogenated ‘‘diamond-like’’ carbonApplied Physics Letters, 1991
- Properties of diamond membranes for x-ray lithographyJournal of Applied Physics, 1990
- Characterization of crystalline quality of diamond films by Raman spectroscopyApplied Physics Letters, 1989
- Correlation of the optical gaps and Raman spectra of hydrogenated amorphous carbon filmsApplied Physics Letters, 1989
- Resonant Raman scattering of diamondlike amorphous carbon filmsApplied Physics Letters, 1988