Depth profiles of boron and nitrogen in SiON films by backside SIMS

Authors:

JSJ. Sameshima
J. Sameshima

Publisher website

25 May 2004

journal article
Published by Elsevier in Applied Surface Science

p. 614-617
DOI:10.1016/s0169-4332(04)00361-7

Abstract

No abstract available

Keywords