Reactive DC magnetron sputtering of aluminum nitride films for surface acoustic wave devices
Authors:
- M.B. AssouarMAM.B. Assouar
- O. ElmazriaO. Elmazria
- L. Le BrizoualLBL. Le Brizoual
- 1 March 2002
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 11 (3-6) , 413-417
Abstract
No abstract availableKeywords
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