Composite ferromagnetic photoresist for the fabrication of microelectromechanical systems
Authors:
- Nicolae DameanNDNicolae Damean
- Babak A ParvizBPBabak A Parviz
- Jessamine Ng LeeJLJessamine Ng Lee
- Teri OdomTOTeri Odom
- George M WhitesidesGWGeorge M Whitesides
- 2 October 2004
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 15 (1) , 29-34
Abstract
No abstract availableThis publication has 16 references indexed in Scilit:
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