Electrophysics of micromechanical comb actuators
Authors:
- W.A. JohnsonWJW.A. Johnson
- L.K. WarneLWL.K. Warne
- 1 March 1995
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 4 (1) , 49-59