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RF Sputter Etching—A Universal Etch
Home
Publications
RF Sputter Etching—A Universal Etch
RF Sputter Etching—A Universal Etch
Author:
PD
P. D. Davidse
P. D. Davidse
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1 January 1969
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 116
(1)
,
100-103
DOI:
10.1149/1.2411707
Abstract
No abstract available
Keywords
UNIVERSAL ETCH
RF SPUTTER ETCHING
Cited
Cited by 20 articles
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