A new magnetic compound fluid slurry and its performance in magnetic field-assisted polishing of oxygen-free copper
- 6 March 2015
- journal article
- conference paper
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 117 (17) , 17D712
Abstract
In nano-precision surface finishing of engineering materials using MCF (magnetic compound fluid) slurry, the water-based MCF slurry is preferable from the viewpoint of the environmental issue and the running cost of cleaning workpiece and equipment. However, the uncoated-CIPs (carbonyl-iron-powders) within the conventional MCF slurry have low ability against aqueous corrosion, leading to the performance deterioration and working life shortening of the conventional MCF slurry. This study proposed a new MCF slurry containing ZrO2-coated CIPs instead of the uncoated CIPs. Its performance in the polishing of oxygen-free copper was compared experimentally with that of the conventional one. The results showed that the work-surface finish polished with the new slurry was in the same level as that with the conventional one when the slurry was used soon after prepared, i.e., the settling time was 0 min; however, as the settling time increased the uncoated-CIPs got rusty, leading to a deterioration in the slurry performance. By contrast, no rust was observed on ZrO2-coated CIPs even the settling time reached several days, indicating the employment of ZrO2-coated CIPs prolonged the working-life of the MCF slurry greatly.Keywords
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