Influence of H2 treatment on the surface morphology of SiC with different wafer orientation and doping
- 25 January 2023
- journal article
- research article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 607
Abstract
No abstract availableKeywords
Funding Information
- National Natural Science Foundation of China (62104222)
- Special Project for Research and Development in Key areas of Guangdong Province (2021B0101300005)
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