Linear Motor-Leviated Stage for Photolithography
- 1 January 1997
- journal article
- Published by Elsevier in CIRP Annals
- Vol. 46 (1) , 447-450
Abstract
No abstract availableKeywords
Funding Information
- Sandia National Laboratories (AH-4243)
- Ministry of Education
- National Science Foundation
This publication has 4 references indexed in Scilit:
- Design and analysis framework for linear permanent-magnet machinesIEEE Transactions on Industry Applications, 1996
- Atomic-Scale Precision Motion Control Stage (The Angstrom Stage)CIRP Annals, 1995
- Magnetic Bearing Stage for PhotolithographyCIRP Annals, 1993
- Study of a basic structure of surface actuatorIEEE Transactions on Magnetics, 1989