A measurement method for micro 3D shape based on grids-processing and stereovision technology

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Abstract
An integrated measurement method for micro 3D surface shape by a combination of stereovision technology in a scanning electron microscope (SEM) and grids-processing methodology is proposed. The principle of the proposed method is introduced in detail. By capturing two images of the tested specimen with grids on the surface at different tilt angles in an SEM, the 3D surface shape of the specimen can be obtained. Numerical simulation is applied to analyze the feasibility of the proposed method. A validation experiment is performed here. The surface shape of the metal-wire/polymer-membrane structures with thermal deformation is reconstructed. By processing the surface grids of the specimen, the out-of-plane displacement field of the specimen surface is also obtained. Compared with the measurement results obtained by a 3D digital microscope, the experimental error of the proposed method is discussed

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