Plasma synthesis of metallic and composite thin films with atomically mixed substrate bonding
Authors:
- A. AndersAAA. Anders
- S. AndersSAS. Anders
- K.-M. YuKYK.-M. Yu
- 1 January 1993
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 80-81, 1281-1287
Abstract
No abstract availableKeywords
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